LIGA method of forming high-contrast collimators and anti-scatter grids with high aspect ratio

LIGA method of forming high-contrast collimators and anti-scatter grids with high aspect ratio Full article

Journal

Resource-Efficient Technologies

Output data

Year: 2018, Number: 2, Pages: 1-4 Pages count : 4 DOI: 10.18799/24056537/2018/2/186

Authors

Goldenberg B.G. ¹ , Lemzyakov A.G. ¹ , Nazmov V.P. ¹ , Palchikov E.I. ²

Affiliations

1	Budker Institute of Nuclear Physics, Siberian Branch of the Russian Academy of Sciences
2	Lavrentyev Institute of Hydrodynamics, Siberian Branch of the Russian Academy of Sciences

Goldenberg B.G. , Lemzyakov A.G. , Nazmov V.P. , Palchikov E.I.
LIGA method of forming high-contrast collimators and anti-scatter grids with high aspect ratio
Resource-Efficient Technologies. 2018. N2. P.1-4. DOI: 10.18799/24056537/2018/2/186 РИНЦ OpenAlex

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